产品应用:
半导体行业加工的工具
实施半导体加工研发和小批量生产
退火
快速热处理
快速退火
k电介质
离子注入后退火
烧结铜
K电阻?
LTO
其他的过程的需求
excellent tool for various semiconductor processes
implementing of new semiconductor processes
prototype research
quality control
Annealing
Rapid Thermal Processes
SiAu, SiAl, SiMo alloying
low k dielectrics
post implanting annealing
copper past firing
resistor paste firing
LTO
other processes on demand
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